Title :
Estimation of the lateral component of the electrostatic force in MEMS
Author :
Dragunov, V.P. ; Seleznev, A.N. ; Kholavko, V.N.
Abstract :
The experimental results and theoretical considerations concerning the lateral component of electrostatic force in MEMS are presented.
Keywords :
electrostatics; micromechanical devices; MEMS; electrostatic force; lateral component estimation; Biosensors; Capacitive sensors; Crystals; Electrostatic measurements; Lithium; Micromechanical devices; Nanobioscience; Piezoresistive devices; Temperature; Water;
Conference_Titel :
Electronic Instrument Engineering, 2008. APEIE 2008. 9th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-2825-0
DOI :
10.1109/APEIE.2008.4897084
