مرکز منطقه ای اطلاع رساني علوم و فناوري - Determination of Evolution Path for B<sub>m</sub>I<sub>n</sub> Clusters in Atomistic Model

DocumentCode :

3285481

Title :

Determination of Evolution Path for B_mI_n Clusters in Atomistic Model

Author :

Yoo, Jae-Hyun ; Hwang, Chi-Ok ; Yoon, Kwan-Sun ; Kim, Jung-Sik ; Won, Taeyoung

fYear :

2005

fDate :

Dec. 7-9, 2005

Firstpage :

406

Lastpage :

407

Keywords :

Bismuth; Boron; Diffusion processes; Electronic mail; Ion implantation; Kinetic theory; Monte Carlo methods; Simulated annealing; Tail;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Semiconductor Device Research Symposium, 2005 International

Print_ISBN :

1-4244-0083-X

Type :

conf

DOI :

10.1109/ISDRS.2005.1596158

Filename :

1596158

Link To Document :