Title :
Characterization of Polysilicon-Oxide-Nitride-Oxide-Silicon (SONOS) Nonvolatile Semiconductor Memory (NVSM) Devices
Author :
Wang, Xiaonan ; Wang, Yu ; Chabalko, Matthew J. ; White, Marvin H. ; Wrazien, Stephen J.
Keywords :
Nonvolatile memory; SONOS devices; Semiconductor memory; Space vector pulse width modulation; Testing; Thickness measurement; Threshold voltage; Tunneling; Velocity measurement; Voltage measurement;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596164