Vacuum microelectronics 1996: where we are and where we are going

This is an exciting time for vacuum microelectronics research and development. It appears to mirror similar developments in the past, e.g. transistors and integrated circuits, lasers and laser based devices, micro-electrical-mechanical-systems (MEMS), and biotechnology products. Starting in 1948, a transition occurred from vacuum devices to solid-state devices. At the beginning of the 21st century, will we see a transition from solid-state back to vacuum, at least for specific niche applications in microelectronics?