Title :
Development of suspended gate field effect transistors array-based microsystem for pH measurements
Author :
Rodrigues, B. Da Silva ; De Sagazan, O. ; Crand, S. ; Le Bihan, F. ; Mohammed-Brahim, T. ; Morimoto, N.
Author_Institution :
Univ. de Rennes 1, Rennes, France
Abstract :
This work presents the specifications of a microsystem which allows pH electrical measurements of solution especially for water monitoring applications. The architecture of this microsystem consists in SGFET (suspended gate field effect transistor) array-based, control and processing modules. The array is composed of 3 × 3 identical SGFET sensors. Each SGFET can be addressed independently to increase the accuracy and the reliability of the global measurements.
Keywords :
field effect transistors; microsensors; pH measurement; SGFET sensors; pH electrical measurements; suspended gate field effect transistors array; water monitoring; Chemicals; Electric variables measurement; Electrodes; FETs; Monitoring; Polarization; Protection; Scanning electron microscopy; Sensor arrays; Silicon;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398502
