Title :
Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
Author :
Kleiner, A. ; Suchaneck, G. ; Adolphi, B. ; Gerlach, G. ; Lavrentiev, V. ; Hubicka, Z. ; Cada, M. ; Jastrabik, L. ; Dejneka, A.
Author_Institution :
Inst. of Solid State Electron., Tech. Univ. Dresden, Dresden, Germany
Abstract :
In this work, we investigate the composition profile of nanocrystalline Pb(Zr, Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed.
Keywords :
Rutherford backscattering; X-ray photoelectron spectra; lead compounds; piezoceramics; piezoelectric thin films; sputter deposition; PZT; Rutherford backscattering; X-ray photoelectron spectroscopy; XPS; composition profiling; copper-coated polymer substrates; high-power pulse sputtering; piezoelectric thin films; reactive magnetron sputtering; Films; Lead; Polymers; Sputtering; Substrates; Surface treatment; Zirconium; PZT; RBS; XPS; polymer substrate; thin film;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297777
