Title :
Electrochemical Vapor Deposition: Theory And Experiment
Author :
Kiwiet, N.J. ; Schoonman, J.
Keywords :
Chemical vapor deposition; Chemistry; Conducting materials; Fabrication; Kinetic theory; LAN interconnection; Laboratories; Lanthanum; Oxidation; Substrates;
Conference_Titel :
Energy Conversion Engineering Conference, 1990. IECEC-90. Proceedings of the 25th Intersociety
Print_ISBN :
0-8169-0490-1
DOI :
10.1109/IECEC.1990.716293
