Title :
Micro gas chromatograph for harsh refinery gas environment: Microvalves based on PEEK membranes
Author :
Nachef, K. ; Bourlon, B. ; Danaie, K. ; Guieze, P. ; Donzier, E. ; Marty, F. ; Bourouina, T.
Author_Institution :
MEMS Schlumberger Center, Schlumberger, Elancourt, France
Abstract :
In the context of refinery gas testing, we studied the potential of a micro-gas chromatograph (¿GC). For this purpose, we fabricated a new type of gas microvalve, based on a polyetheretherketone (PEEK) membrane, which is suitable for the harsh environment of natural gas. Experimental results are presented along with simulations to describe and discuss the static and dynamic behaviors of such a device.
Keywords :
chromatography; membranes; microvalves; natural gas technology; polymers; refining; PEEK membranes; gas microvalve; harsh refinery gas environment; microgas chromatograph; natural gas; polyetheretherketone membrane; refinery gas testing; Biomembranes; Chemicals; Etching; Micromechanical devices; Microvalves; Natural gas; Polymers; Silicon on insulator technology; Temperature; Testing;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398564
