DocumentCode
3287015
Title
Micro gas chromatograph for harsh refinery gas environment: Microvalves based on PEEK membranes
Author
Nachef, K. ; Bourlon, B. ; Danaie, K. ; Guieze, P. ; Donzier, E. ; Marty, F. ; Bourouina, T.
Author_Institution
MEMS Schlumberger Center, Schlumberger, Elancourt, France
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
1081
Lastpage
1085
Abstract
In the context of refinery gas testing, we studied the potential of a micro-gas chromatograph (¿GC). For this purpose, we fabricated a new type of gas microvalve, based on a polyetheretherketone (PEEK) membrane, which is suitable for the harsh environment of natural gas. Experimental results are presented along with simulations to describe and discuss the static and dynamic behaviors of such a device.
Keywords
chromatography; membranes; microvalves; natural gas technology; polymers; refining; PEEK membranes; gas microvalve; harsh refinery gas environment; microgas chromatograph; natural gas; polyetheretherketone membrane; refinery gas testing; Biomembranes; Chemicals; Etching; Micromechanical devices; Microvalves; Natural gas; Polymers; Silicon on insulator technology; Temperature; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398564
Filename
5398564
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