Title :
Bi-layered sensor structures (SnO2 film-CuO nanolayer) with improved response characteristics for H2S gas
Author :
Verma, Manish ; Sreenivas, K. ; Gupta, Vinay ; Chowdhuri, Arijit
Author_Institution :
Dept. of Phys. & Astrophys., Univ. of Delhi, Delhi, India
Abstract :
Two sensor structures (SnO2 film, and SnO2 film-CuO nanolayer) have been prepared in the present study using both rf sputtering and pulsed laser deposition (PLD) techniques for trace level detection of H2S gas (20 ppm). The response characteristic of sensor structures based on bare SnO2 thin film (90 nm) and after integrating with catalytic CuO nanolayer (10 nm) have been investigated and a comparative study has been carried out in detail. The bilayer sensor structures (SnO2 film-CuO nanolayer) prepared by both techniques exhibits enhanced sensitivity in comparison to bare SnO2 film sensor. PLD grown SnO2-CuO bilayer structure shows maximum sensor response (~2.3×103) at a very low operating temperature of 100°C.
Keywords :
catalysts; chemical variables measurement; copper compounds; gas sensors; hydrogen compounds; pulsed laser deposition; semiconductor materials; semiconductor thin films; sputter deposition; tin compounds; CuO; H2S; SnO2; bare film sensor; bilayered sensor structures; catalytic nanolayer; gas sensor; pulsed laser deposition; rf sputtering; temperature 100 degC; thin film; trace level detection; Gas detectors; Pulsed laser deposition; Roentgenium; Semiconductor films; Sensor phenomena and characterization; Sputtering; Substrates; Surface morphology; Temperature sensors; Thin film sensors;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398576
