Title :
Gas ambient dependence of quality factor in MEMS resonators
Author :
Li, Q. ; Goosen, J.F.L. ; van Keulen, F. ; van Beek, J.T.M.
Author_Institution :
Mater. Innovation Inst., Delft, Netherlands
Abstract :
In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external low pressure.
Keywords :
Q-factor; micromechanical resonators; MEMS resonators; gas ambient dependence; low molecular weight gasses; quality factor; Atmospheric measurements; Damping; Gases; Micromechanical devices; Packaging; Q factor; Q measurement; Resonance; Technological innovation; Wafer scale integration;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398588
