DocumentCode :
3288014
Title :
Analytical model for the threshold voltage of dual material gate (DMG) partially depleted SOI MOSFET and evidence for reduced short-channel effects
Author :
Kumar, M. Jagadesh ; Reddy, G. Venkateshwar
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol., New Delhi, India
Volume :
2
fYear :
2004
fDate :
18-21 Oct. 2004
Firstpage :
1204
Abstract :
We propose a unique two dimensional analytical model of a dual material gate partially depleted (DMG-PD) SOI MOSFET. The model includes the calculation of the surface potential, electric field along the channel and threshold voltage using the minimum surface potential. The model takes into account the effects of body doping concentration, gate oxide, buried oxide and silicon film thickness, lengths of the gate metals and their work functions, applied drain and substrate biases. It is seen that the short channel effects in this structure arc diminished because of the step in the surface potential profile which screens the drain potential variations. The results predicted by the model are verified using accurate two-dimensional numerical simulations.
Keywords :
MOSFET; semiconductor device models; semiconductor doping; silicon-on-insulator; substrates; surface potential; DMG-PD SOI MOSFET; body doping concentration; buried oxide; dual material gate; gate oxide; partially depleted SOI MOSFET; reduced short-channel effects; silicon film thickness; substrate bias; surface potential; threshold voltage; Analytical models; Doping; Electric potential; MOSFET circuits; Predictive models; Semiconductor films; Semiconductor process modeling; Silicon; Substrates; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
Type :
conf
DOI :
10.1109/ICSICT.2004.1436745
Filename :
1436745
Link To Document :
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