Title :
Plasma Chemical Etching of Silicon
Keywords :
Biological tissues; Chemicals; Electrodes; Etching; Plasma applications; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma properties; Silicon;
Conference_Titel :
Electronic Instrument Engineering, 2006. APEIE '06. 8th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
5-7782-0662-3
DOI :
10.1109/APEIE.2006.4292454
