Title :
Numerical modelling of microvacuum magnetosensitive cell
Author :
Fedirko, V.A. ; Belova, N.G.
Author_Institution :
Moscow State Univ. of Technol., Russia
Abstract :
Cylindrical microvacuum cell with circular edge cathode and two coaxial plate face anodes is considered as a magnetosensitive element. Electron beam transport in self-consistent electric field is simulated using cylindrical particle-in-mesh code. Static and dynamic characteristics of magnetosensitive element are studied. Several circular grid electrodes are included in the model to control the electron beam. A target plate face electrode is considered as a secondary electron source
Keywords :
magnetic sensors; vacuum microelectronics; circular edge cathode; circular grid electrode; coaxial plate face anode; cylindrical microvacuum cell; dynamic characteristics; electron beam transport; magnetosensitive element; numerical model; particle-in-mesh code; secondary electron source; self-consistent electric field; simulation; static characteristics; target plate face electrode; Anodes; Cathodes; Coaxial components; Coordinate measuring machines; Distribution functions; Electrodes; Electron beams; Magnetic fields; Magnetic sensors; Numerical models;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601778
