Title :
Modeling of Gas Flow in Rotary Ozonizer
Author :
Potapov, S.A. ; Alyshev, S.V.
Keywords :
Anisotropic magnetoresistance; Atomic measurements; Etching; Fluid flow; Frequency; Gases; Mercury (metals); Noise generators; Silicon; Solids;
Conference_Titel :
Electronic Instrument Engineering, 2006. APEIE '06. 8th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
5-7782-0662-3
DOI :
10.1109/APEIE.2006.4292456
