Title :
Mathematical Modeling of Mos-Transistor Fabrication Technology
Author :
Cherkaev, A.S. ; Makarov, E.A. ; Kalinin, S.V.
Keywords :
Calibration; Diffraction; Fabrication; Infrared detectors; Infrared heating; Inspection; MOSFETs; Mathematical model; Wheels; Zirconium;
Conference_Titel :
Electronic Instrument Engineering, 2006. APEIE '06. 8th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
5-7782-0662-3
DOI :
10.1109/APEIE.2006.4292460
