Title :
Macro, micro, nano, and beyond - Keynote talk
Abstract :
Provides an abstract of the keynote presentation and a brief professional biography of the presenter. The complete presentation was not made available for publication as part of the conference proceedings.
Keywords :
Acceleration; Bridges; Electron tubes; Information science; Lithography; Manufacturing automation; Microelectronics; Nanotechnology; Societies; Wiring;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 2004. IEEE/CPMT/SEMI 29th International
Conference_Location :
San Jose, CA, USA
Print_ISBN :
0-7803-8582-9
DOI :
10.1109/IEMT.2004.1321617