Title :
Design of a NEMS based LC oscillation circuit for tiny vibration determination
Author :
Yin, Ming ; Guo, Cangran ; Liu, Zewen ; Zhao, Yingjiang
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
A novel design of NEMS resonator based LC oscillation circuit for detection of tiny vibration is proposed. The relationship between the tiny vibration of the NEMS resonator beam and the frequency of LC oscillation is analyzed. With the resonator as the part of the LC oscillation, IC compatible processes based oscillation circuit are conceived and simulated. The simulation result demonstrates the oscillation bandwidth is 1.75MHz under the 2nm NEMS beam vibration amplitude.
Keywords :
circuit oscillations; nanoelectromechanical devices; nanofabrication; resonators; vibration measurement; IC compatible processes; LC oscillation circuit; NEMS resonator; beam vibration amplitude; frequency 1.75 MHz; tiny vibration determination; wavelength 2 nm; Integrated circuit modeling; MOS devices; Nanoelectromechanical systems; Optical resonators; Oscillators; Resonant frequency; Vibrations; IC compatible; NEMS resonator; oscillation circuit; tiny vibration;
Conference_Titel :
Electric Information and Control Engineering (ICEICE), 2011 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-8036-4
DOI :
10.1109/ICEICE.2011.5778098
