DocumentCode :
3289406
Title :
Photoimageable auto-catalytic resin metallization as an alternative to sputtering
Author :
Kondo, Masaki ; Esposito, Chris ; Imanari, Masaaki ; Nomura, Makoto ; Arao, Kei ; Kanda, Takashi ; Tsukagoshi, Satoru
Author_Institution :
Rohm & Haas Electron. Mater. K.K., Niigata, Japan
fYear :
2004
fDate :
July 14-16, 2004
Firstpage :
238
Lastpage :
241
Abstract :
In order to miniaturized mobile phones, PDAs, and other handheld electronic devise, the use of wafer level packaging such as MCP and SIP with various functionalities has increased significantly. Polyimide, BCB, and epoxy resin systems are widely used as dielectric redistribution materials. Sputtering has been the metallization technology of choice for UBM and seed layers. However, the high cost and poor adhesive reliability are issues with sputtering reliability are issues with sputtering as a metallization technology. As an alternative to sputtering technology, a photoimageable auto-catalytic resin (PAR) has been designed that enables the electroless metallization of a wide variety of substrates, including WL-CSP dielectrics such as polyimide film, glass, and ceramics. PAR also enables interconnects with excellent electrical and adhesive reliability. This paper focuses on the properties and reliability of PAR materials as a new metallization technology.
Keywords :
integrated circuit packaging; metallisation; resins; sputtering; substrates; BCB; MCP; PAR materials; PDA; SIP; UBM; WL-CSP dielectrics; adhesive reliability; ceramics; dielectric redistribution materials; electrical reliability; electroless metallization; epoxy resin; glass; handheld electronic devise; miniaturized mobile phones; photoimageable auto-catalytic resin; polyimide film; seed layers; sputtering reliability; wafer level packaging; Costs; Dielectric materials; Dielectric substrates; Epoxy resins; Metallization; Mobile handsets; Personal digital assistants; Polyimides; Sputtering; Wafer scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 2004. IEEE/CPMT/SEMI 29th International
ISSN :
1089-8190
Print_ISBN :
0-7803-8582-9
Type :
conf
DOI :
10.1109/IEMT.2004.1321668
Filename :
1321668
Link To Document :
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