Title :
An innovative approach to investigate micro tip apexes made of complex materials utilizing imaging-plates
Author :
Nishikawa, Osamu ; Fukui, Kozo ; Sekine, Taku ; Yamamoto, Masahiko ; Nishikawa, Kouichi ; Nishiuchi, Takeshi
Author_Institution :
Dept. of Electron., Kanazawa Inst. of Technol., Ishikawa, Japan
Abstract :
As an innovative approach, micro tip apexes made of complex materials by utilizing field ion microscopy with an imaging-plate (IP-FIM) have been investigated. Here, the two cases are described: (i) field ionization of imaging gas on metals and (ii) imaging of ordered alloys. It is concluded that quantitative analysis of FIM images utilizing IP-FIM provides new information
Keywords :
alloys; field emission ion microscopy; field ionisation; metals; vacuum microelectronics; FIM images; field ion microscopy; field ionization; imaging-plates; metals; micro tip apexes; ordered alloys; Atomic layer deposition; Atomic measurements; Cobalt alloys; Dynamic range; Helium; Image analysis; Instruments; Ionization; Materials science and technology; Nickel alloys;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601788
