Title :
High performance Si3N4 waveguide devices platform
Author :
Xiaoguang Tu ; Junfeng Song ; Xianshu Luo ; Tsung-Yang Liow ; Mingbin Yu ; Guo-Qiang Lo
Author_Institution :
Inst. of Microelectron., A*STAR (Agency of Sci., Technol. & Res.), Singapore, Singapore
Abstract :
Si3N4 strip and slot waveguide passive devices platform are demonstrated based on standard CMOS process including athermal MZI filter, multi-channel ring filter, two-ring EIT and AWG. The loss of Si3N4 strip waveguide is 0.6dB/cm for TE mode and 0.66dB/cm for TM mode. A 20-channel micro-ring filter with 25GHz channel spacing is realized with 15dB cross-talk on this Si3N4 platform. Thermal tuning EIT is demonstrated with two-ring filter structure with heater on one of the ring resonator. A 16-channel AWG is realized with a 100GHz channel spacing and 15 dB extinction ratio.
Keywords :
Mach-Zehnder interferometers; arrayed waveguide gratings; integrated optoelectronics; micro-optics; optical crosstalk; optical losses; optical waveguide filters; self-induced transparency; silicon compounds; 16-channel AWG; 20-channel microring filter; Mach-Zehnder interferometer; Si3N4; TE mode; TM mode; array-waveguide gratings; athermal MZI filter; channel spacing; cross-talk; electromagnetic-induced-transparency; extinction ratio; frequency 100 GHz; frequency 25 GHz; heater; high performance waveguide device platform; multichannel ring filter; ring resonator; slot waveguide passive device platform; standard CMOS process; strip waveguide loss; strip waveguide passive device platform; thermal tuning EIT; two-ring EIT; two-ring filter structure; Heating; Joining processes; Integrated optics devices; microstructure devices; waveguides;
Conference_Titel :
Photonics Global Conference (PGC), 2012
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-2513-4
DOI :
10.1109/PGC.2012.6457972
