Title :
Proceeding of the 2nd International Conference of Young Scientists MEMSTECH 2006
Abstract :
The following topics are dealt with: MEMS design; MEMS testing; visual inspection systems; intelligent computer tools; CAD systems; microaccelerometers; microsensors; microactuators; and micro-optomechanical devices
Keywords :
CAD; accelerometers; automatic optical inspection; circuit layout CAD; micro-optomechanical devices; microactuators; microsensors; CAD systems; MEMS; intelligent computer tools; micro-optomechanical devices; microaccelerometers; microactuators; microsensors; visual inspection systems;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288645
