Title :
An Electromagnetic MEMS Actuator for Micropumps
Author :
Getpreecharsawas, Jirachai ; Puchades, Ivan ; Hournbuckle, Bobby ; Fuller, Lynn ; Pearson, Robert ; Lyshevski, Sergey
Author_Institution :
Dept. of Electr. Eng., Rochester Inst. of Technol., NY
Abstract :
In this paper, design, fabrication and evaluation of an electromagnetic MEMS micropump actuator are reported. Based on MEMS technology, the proposed micropump actuator is designed and fabricated using integrated surface and bulk micromachining at the Microfabrication Facility at the Rochester Institute of Technology. A thin silicon diaphragm with a planar spiral coil ensures the desired degree of robustness and guarantees the specified volumetric changes. The magnetic force is generated due to the interaction between the magnetic field of a permanent magnet and current in the coil. The experimental results are reported
Keywords :
electromagnetic actuators; microactuators; micromachining; micropumps; permanent magnets; bulk micromachining; electromagnetic MEMS actuator; electromagnetic MEMS micropumps; magnetic force; permanent magnet; planar spiral coil; surface micromachining; thin silicon diaphragm; Actuators; Coils; Fabrication; Magnetic forces; Micromachining; Micromechanical devices; Micropumps; Robustness; Silicon; Spirals; Actuator; MEMS; electromagnetic micropump; micromachine; silicon;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288652
