• DocumentCode
    3289914
  • Title

    Computer-Aided System for MEMS Design "ProMIP"

  • Author

    Teslyuk, Vasyl ; Pereyma, Mykola ; Denysyuk, Pavlo ; Chimich, Iryna

  • Author_Institution
    Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
  • fYear
    2006
  • fDate
    38838
  • Firstpage
    49
  • Lastpage
    52
  • Abstract
    In this paper system for microelectromechanical systems (MEMS) end-to-end design is proposed. Such system includes: subsystem for modeling of manufacturing process flows of integrated circuits and MEMS - "ProMIS-T"; subsystem for solid modeling (ProMIP-Tv), functional (ProMIP-F) and system modeling (ProMIP-S)
  • Keywords
    CAD; micromechanical devices; ProMIP-F; ProMIP-Tv; ProMIS-T; computer-aided design; functional modeling; integrated circuits; manufacturing process flows; microelectromechanical systems; solid modeling; system modeling; Design automation; Fabrication; Integrated circuit modeling; Mathematical model; Microelectromechanical systems; Micromechanical devices; Microprocessors; Process design; Solid modeling; Transducers; CAD system; MEMS design; modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
  • Conference_Location
    Lviv
  • Print_ISBN
    966-553-517-X
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2006.288661
  • Filename
    4068425
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3289914