Title :
Computer-Aided System for MEMS Design "ProMIP"
Author :
Teslyuk, Vasyl ; Pereyma, Mykola ; Denysyuk, Pavlo ; Chimich, Iryna
Author_Institution :
Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
Abstract :
In this paper system for microelectromechanical systems (MEMS) end-to-end design is proposed. Such system includes: subsystem for modeling of manufacturing process flows of integrated circuits and MEMS - "ProMIS-T"; subsystem for solid modeling (ProMIP-Tv), functional (ProMIP-F) and system modeling (ProMIP-S)
Keywords :
CAD; micromechanical devices; ProMIP-F; ProMIP-Tv; ProMIS-T; computer-aided design; functional modeling; integrated circuits; manufacturing process flows; microelectromechanical systems; solid modeling; system modeling; Design automation; Fabrication; Integrated circuit modeling; Mathematical model; Microelectromechanical systems; Micromechanical devices; Microprocessors; Process design; Solid modeling; Transducers; CAD system; MEMS design; modeling;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288661
