Control performance assessment and diagnosis for semiconductor processes

In this work we briefly review the current status of control performance assessment (CPA) and control performance diagnosis (CPD) in semiconductor processes, and present an integrated CPA/CPD framework for semiconductor processes. By identifying the model-plant mismatch and process disturbance dynamics explicitly, CPA and CPD can be performed simultaneously in the proposed framework. Two performance indices and an on-line implementation scheme are introduced, and the performance of the proposed CPA/CPD methods is demonstrated using two simulation studies.