Title :
Features of microelectromechanical systems design
Author :
Teslyuk, Vasyl ; Pereyma, Mykola ; Karkulyovskyy, Volodymyr ; Lobur, Mykhaylo
Author_Institution :
Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
Abstract :
In this article author consider features or design and structure of microelectromechanical systems (MEMS) and propose to embed an algorithmic aspect. Usage of upward, downward and parallel MEMS design with algorithms on each of hierarchical levels are proposed
Keywords :
CAD; micromechanical devices; CAD system; microelectromechanical systems design; Actuators; Algorithm design and analysis; Fabrication; Microactuators; Microelectromechanical systems; Micromechanical devices; Microprocessors; Microsensors; Signal processing; Transducers; CAD system; MEMS; system structure;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288666
