DocumentCode
3290193
Title
Subsystem Development on the Functional Level of MEMS Design
Author
Teslyuk, V. ; Kushnir, Y. ; Soltysyak, S.
Author_Institution
Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
fYear
2006
fDate
24-27 May 2006
Firstpage
134
Lastpage
137
Abstract
In this paper, a subsystem development on the functional level of MEMS design is considered
Keywords
differential equations; micromechanical devices; MEMS design; differential equation; functional level; subsystem development; Algorithms; Design automation; Differential equations; History; Humans; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Modems; Sequences; MEMS; design level; differential equation;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location
Lviv
Print_ISBN
966-553-517-X
Type
conf
DOI
10.1109/MEMSTECH.2006.288682
Filename
4068446
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