Title :
Subsystem Development on the Functional Level of MEMS Design
Author :
Teslyuk, V. ; Kushnir, Y. ; Soltysyak, S.
Author_Institution :
Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
Abstract :
In this paper, a subsystem development on the functional level of MEMS design is considered
Keywords :
differential equations; micromechanical devices; MEMS design; differential equation; functional level; subsystem development; Algorithms; Design automation; Differential equations; History; Humans; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Modems; Sequences; MEMS; design level; differential equation;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288682
