Title :
Petri Networks Application during MEMS Design Process
Author :
Teslyuk, V. ; Romanyuk, A. ; Matviykiv, T.
Author_Institution :
Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
Abstract :
This paper is to define the peculiarities of Petri networks application on the system level of MEMS design
Keywords :
Petri nets; micromechanical devices; MEMS design process; Petri networks; Actuators; Computational modeling; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Microprocessors; Process design; Sensor systems; Signal analysis; Signal processing; MEMS; Petri networks;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288689
