Title :
Modeling Short-channel Effects Of Cmosfet´s Taking Account For Channel-engineering, Defect-enhanced-diffusion And Gate-depletion
Author :
Yu, Bin ; Lee, Wen-Chin ; Hu, Chenming
Keywords :
CMOS process; CMOS technology; CMOSFETs; Degradation; Design engineering; Doping profiles; Implants; MOSFETs; Semiconductor device modeling; Semiconductor process modeling;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
Conference_Location :
Taipei, Taiwan
Print_ISBN :
0-7803-4131-7
DOI :
10.1109/VTSA.1997.614913