• DocumentCode
    3290413
  • Title

    Modeling Short-channel Effects Of Cmosfet´s Taking Account For Channel-engineering, Defect-enhanced-diffusion And Gate-depletion

  • Author

    Yu, Bin ; Lee, Wen-Chin ; Hu, Chenming

  • fYear
    1997
  • fDate
    3-5 June 1997
  • Firstpage
    298
  • Lastpage
    302
  • Keywords
    CMOS process; CMOS technology; CMOSFETs; Degradation; Design engineering; Doping profiles; Implants; MOSFETs; Semiconductor device modeling; Semiconductor process modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
  • Conference_Location
    Taipei, Taiwan
  • ISSN
    1524-766X
  • Print_ISBN
    0-7803-4131-7
  • Type

    conf

  • DOI
    10.1109/VTSA.1997.614913
  • Filename
    614913