DocumentCode
3290413
Title
Modeling Short-channel Effects Of Cmosfet´s Taking Account For Channel-engineering, Defect-enhanced-diffusion And Gate-depletion
Author
Yu, Bin ; Lee, Wen-Chin ; Hu, Chenming
fYear
1997
fDate
3-5 June 1997
Firstpage
298
Lastpage
302
Keywords
CMOS process; CMOS technology; CMOSFETs; Degradation; Design engineering; Doping profiles; Implants; MOSFETs; Semiconductor device modeling; Semiconductor process modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
Conference_Location
Taipei, Taiwan
ISSN
1524-766X
Print_ISBN
0-7803-4131-7
Type
conf
DOI
10.1109/VTSA.1997.614913
Filename
614913
Link To Document