A hybrid OPEN model technique for accurate device characterization

A hybrid OPEN model, which consists of equivalent circuit model and behavior transmission line (TL) model, is proposed to accurately extract device characteristics. The proposed method requires only one OPEN dummy structure so the silicon occupation area is efficiently reduced. The other benefit is it avoids the errors, which is occurred while performing the classical de-embedding procedure. A Ka-band CPW filter is fabricated in 130 nm RF CMOS technique to prove this method is efficient up to 67 GHz.