DocumentCode

329130

Title

Polysilicon Integrated Microsystems: Technologies And Applications

Author

Howe, Roger T.

Author_Institution

University of California at Berkeley

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

43

Lastpage

46

Keywords

Accelerometers; Annealing; Application software; CMOS technology; Capacitive sensors; Microcavities; Microstructure; Silicon; Surface topography; Tensile strain;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717078

Filename

717078