Title :
Polysilicon Integrated Microsystems: Technologies And Applications
Author_Institution :
University of California at Berkeley
Keywords :
Accelerometers; Annealing; Application software; CMOS technology; Capacitive sensors; Microcavities; Microstructure; Silicon; Surface topography; Tensile strain;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717078
