• DocumentCode
    329141
  • Title

    pH-controlled TMAH Etchants For Silicon Micromachining

  • Author

    Tabata, Osamu

  • Author_Institution
    Toyota Central Research and Development Laboratories, Inc.
  • Volume
    1
  • fYear
    1995
  • fDate
    25-29 Jun 1995
  • Firstpage
    83
  • Lastpage
    86
  • Keywords
    Aluminum; Anisotropic magnetoresistance; Etching; Mechanical variables measurement; Micromachining; Research and development; Rough surfaces; Silicon; Surface roughness; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.717094
  • Filename
    717094
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=329141