Title :
Confined Selective Epitaxial Growth: Potential For Smart Silicon Sensor Fabrication
Author :
Bartek, M. ; Gennissen, P.T.J. ; French, P.J. ; Wolffenbuttel, R.F.
Author_Institution :
Delft University of Technology
Keywords :
Annealing; Cleaning; Epitaxial growth; Etching; Fabrication; Intelligent sensors; Plasma applications; Plasma chemistry; Silicon on insulator technology; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717099
