Title :
Selective Seeding Of Copper Films On Polyimide Patterned Silicon Substrate, Using Ion Implantation
Author :
Bhansali, S. ; Sood, D.K.
Author_Institution :
Royal Melbourne Institute of Technology
Keywords :
Chemicals; Copper; Etching; Fabrication; Ion implantation; Lithography; Polyimides; Resists; Semiconductor films; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717100
