DocumentCode

329145

Title

Hexsil Bimorphs For Vertical Actuation

Author

Keller, Chris G. ; Howe, Roger T.

Author_Institution

University of California at Berkeley

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

99

Lastpage

102

Keywords

Actuators; Design engineering; Etching; Glass; Hafnium; Poles and towers; Residual stresses; Silicon; Solid state circuits; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717102

Filename

717102