Title :
Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface Micromachining
Author :
van Drieenhuizen, B.P. ; Wolffenbuttel, R.F.
Author_Institution :
Delft University of Technology
Keywords :
Bridge circuits; Capacitance; Capacitors; Damping; Electrodes; Electrostatics; Fabrication; Impedance; Micromachining; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717110
