Title :
On-chip Integration Of High-voltage Generator Circuits For An Electrostatic Micromotor
Author :
Jiang, Hong ; Carr, William N.
Author_Institution :
New Jersey Institute of Technology
Keywords :
CMOS process; CMOS technology; Capacitors; Circuits; Clocks; Diodes; Electrostatics; Micromotors; Power supplies; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717118
