DocumentCode

329155

Title

On-chip Integration Of High-voltage Generator Circuits For An Electrostatic Micromotor

Author

Jiang, Hong ; Carr, William N.

Author_Institution

New Jersey Institute of Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

150

Lastpage

153

Keywords

CMOS process; CMOS technology; Capacitors; Circuits; Clocks; Diodes; Electrostatics; Micromotors; Power supplies; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717118

Filename

717118