Title :
High-voltage Devices And Circuits Fabricated Using Foundry Cmos For Use With Electrostatic Mem Actuators
Author :
Maluf, N.I. ; Reay, R.J. ; Kovacs, G.T.A.
Author_Institution :
Lucas NovaSensor
Keywords :
CMOS process; Circuits; Electric breakdown; Electrodes; Electrostatics; Fasteners; Foundries; MOS devices; Testing; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717121
