Title :
Fast 3d Laser Micromachining Of Silicon For Micromechanical And Microfluidic Applications
Author :
Müllenborn, M. ; Dirac, H. ; Petersen, J.W. ; Bouwstra, S.
Author_Institution :
Danmarks Tekniske Universitet
Keywords :
Atmosphere; Biomembranes; Etching; Laser beam cutting; Laser beams; Microfluidics; Micromachining; Micromechanical devices; Prototypes; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717124
