Title :
Micro Assembly By High Rate CVD Using CW UV Laser
Author :
Sugihara, Masahisa ; Minarni, K. ; Esashi, Masayoshi
Author_Institution :
Tohoku University
Keywords :
Actuators; Assembly; Bonding; Catheters; Gas lasers; Optical pulses; Polymers; Power lasers; Pulsed laser deposition; Space vector pulse width modulation;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717125
