DocumentCode

329160

Title

Micro Assembly By High Rate CVD Using CW UV Laser

Author

Sugihara, Masahisa ; Minarni, K. ; Esashi, Masayoshi

Author_Institution

Tohoku University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

170

Lastpage

173

Keywords

Actuators; Assembly; Bonding; Catheters; Gas lasers; Optical pulses; Polymers; Power lasers; Pulsed laser deposition; Space vector pulse width modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717125

Filename

717125