DocumentCode

329161

Title

A Reshaping Technology With Joule Heat For Three Dimensional Silicon Structures

Author

Fukuta, Yamato ; Akiyama, Terunobu ; Fujita, Hiroyuki

Author_Institution

The University of Tokyo

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

174

Lastpage

177

Keywords

Annealing; Fasteners; Heating; Machining; Plasma applications; Plastics; Resists; Shape; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717127

Filename

717127