Title :
A Reshaping Technology With Joule Heat For Three Dimensional Silicon Structures
Author :
Fukuta, Yamato ; Akiyama, Terunobu ; Fujita, Hiroyuki
Author_Institution :
The University of Tokyo
Keywords :
Annealing; Fasteners; Heating; Machining; Plasma applications; Plastics; Resists; Shape; Silicon; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717127
