Title :
Process-dependent Thermophysical Properties Of CMOS IC Thin Films
Author :
Paul, O. ; von Arx, M. ; Baltes, H.
Author_Institution :
ETH Zurich
Keywords :
CMOS integrated circuits; CMOS process; Charge carrier density; Microsensors; Resistance heating; Silicon; Testing; Thermal conductivity; Thermal resistance; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717128
