• DocumentCode
    329162
  • Title

    Process-dependent Thermophysical Properties Of CMOS IC Thin Films

  • Author

    Paul, O. ; von Arx, M. ; Baltes, H.

  • Author_Institution
    ETH Zurich
  • Volume
    1
  • fYear
    1995
  • fDate
    25-29 Jun 1995
  • Firstpage
    178
  • Lastpage
    181
  • Keywords
    CMOS integrated circuits; CMOS process; Charge carrier density; Microsensors; Resistance heating; Silicon; Testing; Thermal conductivity; Thermal resistance; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.717128
  • Filename
    717128
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=329162