Title :
Alignment Of Mask Patterns To Crystal Orientation
Author_Institution :
The University of Southampton
Keywords :
Computer science; Crystallography; Etching; Inspection; Lithography; Microscopy; Optical sensors; Shape; Silicon; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717131
