Title :
Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization
Author :
Lange, P. ; Kirsten, M. ; Riethmüller, W. ; Wenk, B. ; Zwicker, G. ; Morante, J.R. ; Ericson, F. ; Schweitz, J.A.
Author_Institution :
Fraunhofer-Institut fur Siliziumtechnologie
Keywords :
Chemical vapor deposition; Dry etching; Inductors; Lithography; Mechanical factors; Micromechanical devices; Residual stresses; Silicon; Surface cracks; Surface morphology;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717139
