DocumentCode
329168
Title
Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization
Author
Lange, P. ; Kirsten, M. ; Riethmüller, W. ; Wenk, B. ; Zwicker, G. ; Morante, J.R. ; Ericson, F. ; Schweitz, J.A.
Author_Institution
Fraunhofer-Institut fur Siliziumtechnologie
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
202
Lastpage
203
Keywords
Chemical vapor deposition; Dry etching; Inductors; Lithography; Mechanical factors; Micromechanical devices; Residual stresses; Silicon; Surface cracks; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717139
Filename
717139
Link To Document