Title :
Quality Of The Aluminium Press-on Contacts For Glass To Silicon Bonding
Author :
Kádár, Zsolt ; Bossche, Andre ; Mollinger, Jeff
Author_Institution :
Delft University of Technology
Keywords :
Aluminum; Bonding; Capacitors; Contacts; Electrodes; Etching; Glass; Parasitic capacitance; Silicon; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717152
