DocumentCode :
329184
Title :
A Multilayer Ceramic Package For Silicon Micromachined Accelerometers
Author :
Koen, Edward ; Pourahmadi, Farzad ; Terry, Stephen
Author_Institution :
EG&G IC Sensors
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
273
Lastpage :
276
Keywords :
Accelerometers; Application specific integrated circuits; Assembly; Automotive engineering; Ceramics; Electronics packaging; Nonhomogeneous media; Silicon; Thermal stresses; Vehicle dynamics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717170
Filename :
717170
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=329184
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