Title :
A High-resolution Laser-based Deflection Measurement System For Characterizing Aluminum Electrostatic Actuators
Author :
Honer, Kenneth A. ; Maluf, Nadim I. ; Martinez, Edwardo ; Kovacs, Gregory T A
Author_Institution :
Stanford University
Keywords :
Aluminum; Bandwidth; Electrostatic actuators; Electrostatic measurements; Laser beams; Lenses; Optical attenuators; Optical filters; Optical interferometry; Photodiodes;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717180
