Title :
Electromagnetic Linear Actuators With Inductive Position Sensing For Micro Relay, Micro Valve And Precision Positioning Applications
Author :
Guckel, H. ; Earles, T. ; Klein, J. ; Zook, D. ; Ohnstein, T.
Author_Institution :
University of Wisconsin
Keywords :
Coils; Electromagnetic forces; Electromagnetic induction; Hydraulic actuators; Magnetic materials; Magnetosphere; Microrelays; Microvalves; Soft magnetic materials; Springs;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717184