Title :
A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
Author :
Liu, Chang ; Tsao, Thomas ; Tai, Yu-Chong ; Liu, Wenheng ; Will, Peter ; Ho, Chih-Ming
Author_Institution :
California Institute of Technology
Keywords :
Actuators; Assembly systems; Computational modeling; Fabrication; Intelligent robots; Magnetic levitation; Magnetic separation; Robotic assembly; Silicon; Transportation;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717185