DocumentCode :
329194
Title :
A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
Author :
Liu, Chang ; Tsao, Thomas ; Tai, Yu-Chong ; Liu, Wenheng ; Will, Peter ; Ho, Chih-Ming
Author_Institution :
California Institute of Technology
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
328
Lastpage :
331
Keywords :
Actuators; Assembly systems; Computational modeling; Fabrication; Intelligent robots; Magnetic levitation; Magnetic separation; Robotic assembly; Silicon; Transportation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717185
Filename :
717185
Link To Document :
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