DocumentCode :
329196
Title :
Electrostatic And Magnetoelastic Microactuation Of Si/sun 3/N4 Bridges
Author :
Shearwood, C. ; Pate, M.A. ; Affane, W. ; Whitehouse, C.R. ; Woodhead, J. ; Gibbs, M.R.J.
Author_Institution :
University of Sheffield
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
336
Lastpage :
339
Keywords :
Anisotropic magnetoresistance; Bridge circuits; Electrodes; Electrostatics; Magnetic materials; Magnetic multilayers; Optical films; Optical sensors; Sun; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717187
Filename :
717187
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=329196
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