DocumentCode
3292059
Title
Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
Author
Palviainen, Tanja ; Leinonen, Kari ; Tuuva, Tuure ; Eränen, Simo ; Härkönen, Jaakko ; Luukka, Panja ; Tuovinen, Esa
Author_Institution
Dept. of Electr. Eng., Lappeenranta Univ. of Technol., Finland
Volume
3
fYear
2005
fDate
23-29 Oct. 2005
Firstpage
1379
Lastpage
1382
Abstract
The structure of silicon semi three-dimensional radiation detector is simulated on purpose to find out its electrical characteristics such as the depletion voltage and electric field. Two-dimensional simulation results are compared to voltage and electric field measurements done by a scanning electron microscope.
Keywords
scanning electron microscopes; silicon radiation detectors; Silvaco/ATLAS simulation tool; depletion voltage; electric field; scanning electron microscope; silicon semi three-dimensional radiation detector; two-dimensional simulation; Anodes; Cathodes; Doping profiles; Electric variables measurement; Electrodes; Radiation detectors; Scanning electron microscopy; Silicon radiation detectors; Strips; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Nuclear Science Symposium Conference Record, 2005 IEEE
ISSN
1095-7863
Print_ISBN
0-7803-9221-3
Type
conf
DOI
10.1109/NSSMIC.2005.1596576
Filename
1596576
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